Analysis of high precision detection technique based on optical MEMS accelerometer with double gratings

doi:10.23919/JSEE.2025.000072

Journal of Systems Engineering and Electronics ›› 2025, Vol. 36 ›› Issue (5): 1335-1341.doi: 10.23919/JSEE.2025.000072

• CONTROL THEORY AND APPLICATION • Previous Articles

Analysis of high precision detection technique based on optical MEMS accelerometer with double gratings

Honghao MA¹(), Xiao WANG¹(), Shan GAO²(), Yu ZHANG³^,*()

¹ School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 150001, China
² Beijing Institute of Electronic System Engineering, Beijing 100854, China
³ National Innovative Institute of Defense Technology, Beijing 100071, China

Received:2024-07-24 Online:2025-10-18 Published:2025-10-24
Contact: Yu ZHANG E-mail:mahonghao@buaa.edu.cn;dogno@vip.qq.com;shangao@buaa.edu.cn;zhangyu163buaa@163.com
About author:
MA Honghao was born in 1992. He received his Ph.D. degree in optical engineering from the School of Instrumentation and Optoelectronic Engineering, Beihang University. He is an assistant professor with the School of Instrumentation and Optoelectronic Engineering, Beihang University. His research interest is micro electro-mechanical system (MEMS) sensors. E-mail: mahonghao@buaa.edu.cn

WANG Xiao was born in 1987. He received his Ph.D. degree in optical engineering from Beihang University. He is an assistant professor in the School of Instrumentation and Optoelectronic Engineering, Beihang University. His research interest is inertial navigation technology. E-mail: dogno@vip.qq.com

GAO Shan was born in 1992. He received his Ph.D. degree in optical engineering from Beihang University. He is an assistant professor in Beijing Institute of Electronic System Engineering. His research interest is inertial sensor integration. E-mail: shangao@buaa.edu.cn

ZHANG Yu was born in 1991. She received her Ph.D. degree in optical engineering from Beihang University. She is an assistant professor in National Innovative Institute of Defense Technology. Her research interest is optical accelerometer. E-mail: zhangyu163buaa@163.com
Supported by:
This work was supported by the National Natural Science Foundation of China (62205377).

Abstract

Abstract:

A high precision detection technique is analyzed based on the optical micro electro-mechanical system (MEMS) accelerometer with double gratings for noise suppression and scale factor enhancement. The brief sensing model and modulation detection model are built using the phase sensitive detection, and the relationship between stimulated acceleration and system output is given. The schematics of gap modulation and light intensity modulation are analyzed respectively, and the choice of modulation frequency in the optical MEMS accelerometer system is discussed. According to the experimental results, the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation, and the signal to noise ratio is improved from 42.95 dB to 81.73 dB. The overall noise level in the optical MEMS accelerometer is effectively suppressed.

Key words: accelerometer, optics, micro electro-mechanical system (MEMS), noise suppression

Honghao MA, Xiao WANG, Shan GAO, Yu ZHANG. Analysis of high precision detection technique based on optical MEMS accelerometer with double gratings[J]. Journal of Systems Engineering and Electronics, 2025, 36(5): 1335-1341.

Figures/Tables 5

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Analysis of high precision detection technique based on optical MEMS accelerometer with double gratings

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